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Patent Searching and Data


Title:
ロールブラシ及び基板の液処理装置
Document Type and Number:
Japanese Patent JP4760791
Kind Code:
B2
Inventors:
河村 浩一
小笠原 和義
Application Number:
JP2007178096A
Publication Date:
August 31, 2011
Filing Date:
July 06, 2007
Export Citation:
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Assignee:
株式会社日立ハイテクノロジーズ
International Classes:
B08B1/04; A46B7/10; B08B3/02; B08B7/04; B24D13/10; G02F1/1333
Domestic Patent References:
JP6169817A
JP11137092A
JP2002205277A
JP2001299656A
JP2000245531A
JP61226322A
JP2006187747A
Attorney, Agent or Firm:
影井 俊次
影井 慶大