Title:
感光性組成物除去液
Document Type and Number:
Japanese Patent JP4762162
Kind Code:
B2
Inventors:
Mutsumi Funai
Masato Kaneda
Masato Kaneda
Application Number:
JP2007012437A
Publication Date:
August 31, 2011
Filing Date:
January 23, 2007
Export Citation:
Assignee:
SHOWA DENKO K.K.
International Classes:
G03F7/42; G02B5/20; H01L21/027
Domestic Patent References:
| JP11189794A |
Foreign References:
| WO1991013697A1 |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Kazuo Yoshii
Takashi Ishida
Tetsuji Koga
Kazuo Yoshii