Title:
平面型X-Yテーブル
Document Type and Number:
Japanese Patent JP4766360
Kind Code:
B2
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Inventors:
Tomohiro Matsuo
Application Number:
JP2001050698A
Publication Date:
September 07, 2011
Filing Date:
February 26, 2001
Export Citation:
Assignee:
Yaskawa Electric Co., Ltd.
International Classes:
G05D3/00; G12B5/00; B23Q1/62; G02B21/26; H05K13/04
Domestic Patent References:
| JP61109114A | ||||
| JP5067433U | ||||
| JP2024033A | ||||
| JP3024032A | ||||
| JP10217054A | ||||
| JP6058266U | ||||
| JP10138081A | ||||
| JP11297256A | ||||
| JP7004491A | ||||
| JP4005327U | ||||
| JP4117245U | ||||
| JP7276166A | ||||
| JP5016080U | ||||
| JP8049756A |
Attorney, Agent or Firm:
Masu Kobori
Takato Tsutsumi
Takato Tsutsumi