Title:
有機電界発光表示装置の製造装置及び製造方法
Document Type and Number:
Japanese Patent JP4768838
Kind Code:
B2
Abstract:
An apparatus and method for fabricating an organic light emitting diode display device are provided. The apparatus for fabricating an organic light emitting diode display device includes a chamber, a mask disposed in the chamber to mount a substrate on the upper surface thereof and having a certain pattern of openings, a deposition material source disposed under the mask and supplying a deposition material to the mask through the openings of the mask to form a layer on the substrate, and a holding unit pressing the substrate toward the mask. The holding unit includes a member that is capable of being deformed according to a deformed shape of the substrate such that the mask closely contacts the substrate.
Inventors:
Ikunori Kobayashi
Application Number:
JP2009113704A
Publication Date:
September 07, 2011
Filing Date:
May 08, 2009
Export Citation:
Assignee:
Samsung Mobile Display Co., Ltd.
International Classes:
H05B33/10; C23C14/04; C23C14/50; G09F9/30; H01L27/32; H01L51/50
Domestic Patent References:
| JP9306415A | ||||
| JP2005158571A | ||||
| JP2005248249A | ||||
| JP2006176809A | ||||
| JP2003138375A | ||||
| JP4089547U | ||||
| JP4136166A | ||||
| JP2007207632A | ||||
| JP2004214015A | ||||
| JP2007046099A | ||||
| JP2008059757A | ||||
| JP2006169625A | ||||
| JP2001003155A | ||||
| JP2008108596A | ||||
| JP2005281746A | ||||
| JP2002075638A | ||||
| JP2004183105A |
Attorney, Agent or Firm:
IPD International Patent Business Corporation
Miaki Kametani
Tetsuo Kanamoto
Miaki Kametani
Tetsuo Kanamoto