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Title:
同軸磁化プラズマ生成装置と同軸磁化プラズマ生成装置を用いた膜形成装置
Document Type and Number:
Japanese Patent JP4769014
Kind Code:
B2
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Inventors:
Tomohiko Asai
Tsutomu Takahashi
Application Number:
JP2005131611A
Publication Date:
September 07, 2011
Filing Date:
April 28, 2005
Export Citation:
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Assignee:
NIHON UNIVERSITY
International Classes:
H05H1/24; C23C14/32; H02M9/04; H05H1/26; H05H1/36; H05H1/40
Domestic Patent References:
JP11144890A
JP6151093A
JP6151094A
JP7201497A
JP8179066A
JP63216299A
Other References:
Y. Mizuno, T. Sometani,Pulse Vertical Field Circuit for A Small Tokamak,KEK Proc.,日本,1999年11月,99-16,355-356
浅井朋彦ら,日大における高ベータST/FRC研究の現状,電気学会プラズマ研究会資料,日本,2005年,PST-05-64,53-58
Attorney, Agent or Firm:
Masamitsu Ariga



 
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