Title:
量子デバイス及びその製造方法
Document Type and Number:
Japanese Patent JP4771682
Kind Code:
B2
Inventors:
Song Uchi
Usuki Tatsuya
Usuki Tatsuya
Application Number:
JP2004325527A
Publication Date:
September 14, 2011
Filing Date:
November 09, 2004
Export Citation:
Assignee:
富士通株式会社
International Classes:
H01L29/06; B82B1/00; B82B3/00; H01L21/302; H01L29/66
Domestic Patent References:
| JP2004247431A | ||||
| JP2001326188A | ||||
| JP10079364A | ||||
| JP4293288A | ||||
| JP2003338618A | ||||
| JP2003338621A | ||||
| JP10242141A | ||||
| JP11026748A | ||||
| JP9283736A |
Attorney, Agent or Firm:
Takayoshi Kokubun