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Title:
オートフォーカス装置及びオートフォーカス方法
Document Type and Number:
Japanese Patent JP4773077
Kind Code:
B2
Abstract:

To realize quick automatic focusing in a simple configuration.

This is an automatic focusing device which has an imaging optical system 1 to take the image of a measured object 7 through an objective lens 8 provided facing it, a drive mechanism 4 to move the imaging optical system 1 in the direction to the optical axis of the objective lens 8, and a controller 5 to control the drive mechanism 4 which carries out drive control of the above drive mechanism 4 based on the image of the measured object 7 taken by the imaging optical system 1. It has a projection optical system 2 to project three projection patterns focused in different positions in the direction of the optical axis of the objective lens 8 on the measuring plane for the measured object 7 through the objective lens 8. It compares the projected image sizes of the three projection patterns obtained by the controller 5 in the imaging optical system 1 and controls their positions to make their sizes satisfy the predetermined relations.

COPYRIGHT: (C)2006,JPO&NCIPI


Inventors:
Masami Iwamoto
Application Number:
JP2004330388A
Publication Date:
September 14, 2011
Filing Date:
November 15, 2004
Export Citation:
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Assignee:
Buoy Technology Co., Ltd.
International Classes:
G02B7/28; G02B7/36; H04N5/232
Domestic Patent References:
JP11183784A
JP1204012A
JP9049965A
JP10221592A
JP10227971A
JP62089010A
JP61165717A
JP4116414A
JP4186209A
JP7087378A
JP62115114A
JP62019828A
JP59010912A
JP2002357764A
Attorney, Agent or Firm:
Tomijio Sasashima