Title:
センサの製造方法
Document Type and Number:
Japanese Patent JP4773266
Kind Code:
B2
Inventors:
Yasuhiro Fujita
Shigeki Egashira
Shimogo Touma
Masato Itazu
Shigeki Egashira
Shimogo Touma
Masato Itazu
Application Number:
JP2006134367A
Publication Date:
September 14, 2011
Filing Date:
May 12, 2006
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
G01N27/409
Domestic Patent References:
| JP2000193632A | ||||
| JP2000249678A | ||||
| JP2002090336A | ||||
| JP2001208724A | ||||
| JP2002181765A | ||||
| JP2003194764A | ||||
| JP2003194765A |
Attorney, Agent or Firm:
Patent Business Corporation Cosmos Patent Office