Title:
基板処理装置および基板処理方法
Document Type and Number:
Japanese Patent JP4776030
Kind Code:
B2
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Inventors:
Masahiro Miyagi
Masanobu Sato
Masanobu Sato
Application Number:
JP2007090002A
Publication Date:
September 21, 2011
Filing Date:
March 30, 2007
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/304
Domestic Patent References:
JP2006269677A | ||||
JP2003278972A | ||||
JP2005000722A | ||||
JP7326601A | ||||
JP2004214426A |
Attorney, Agent or Firm:
Masahiro Matsusaka