Title:
接着膜テープ収納用カセット交換装置
Document Type and Number:
Japanese Patent JP4782223
Kind Code:
B2
Inventors:
Takahashi Toshio
Suzuki Masahiro
Suzuki Masahiro
Application Number:
JP2009202661A
Publication Date:
September 28, 2011
Filing Date:
September 02, 2009
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
B65H19/12; H01L21/60
Domestic Patent References:
| JP5155481A | ||||
| JP2000118517A | ||||
| JP2000276828A |
Attorney, Agent or Firm:
Kenji Yoshitake
Hiroyuki Nagai
Junpei Okada
Hirohito Katsunuma
Katsuomi Isogai
Hiroyuki Ohno
Hiroyuki Nagai
Junpei Okada
Hirohito Katsunuma
Katsuomi Isogai
Hiroyuki Ohno