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Title:
シリコン単結晶の製造方法
Document Type and Number:
Japanese Patent JP4788444
Kind Code:
B2
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Inventors:
Hiroki Murakami
Yasuhiro Kogure
Application Number:
JP2006102987A
Publication Date:
October 05, 2011
Filing Date:
April 04, 2006
Export Citation:
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Assignee:
Sumco inc.
International Classes:
C30B29/06; C30B15/10
Domestic Patent References:
JP2003505335A
JP2005343707A
JP2006036568A
JP2002539068A
JP11021196A
Attorney, Agent or Firm:
Michio Mori



 
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