Title:
露光装置およびデバイス製造方法
Document Type and Number:
Japanese Patent JP4789352
Kind Code:
B2
Inventors:
Takakichi Arakawa
Application Number:
JP2001184536A
Publication Date:
October 12, 2011
Filing Date:
June 19, 2001
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/22; H01L21/027; H01L21/02
Domestic Patent References:
| JP2001118790A | ||||
| JP4104841A | ||||
| JP4189982A | ||||
| JP2030829U | ||||
| JP9246140A | ||||
| JP58119824U |
Foreign References:
| WO2000074120A1 | ||||
| WO2000074118A1 |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa