Title:
感放射線性樹脂組成物
Document Type and Number:
Japanese Patent JP4790081
Kind Code:
B2
Inventors:
Nishimura Yukio
Noboru Yamahara
Yamamoto Masashi
Tohru Kajita
Tsutomu Shimokawa
Hiroshi Ito
Noboru Yamahara
Yamamoto Masashi
Tohru Kajita
Tsutomu Shimokawa
Hiroshi Ito
Application Number:
JP2010246045A
Publication Date:
October 12, 2011
Filing Date:
November 02, 2010
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/039; C08F214/18; C08F220/22; C08F220/24; C08F232/08; C08G61/08; C08K5/10; C08L27/12; C08L33/06; C08L33/16; C08L35/00; C08L101/08; G03F7/004; H01L21/027; G03F
Domestic Patent References:
| JP2000109545A | ||||
| JP2000112130A | ||||
| JP2002543469A | ||||
| JP2002525683A |
Attorney, Agent or Firm:
Toshiaki Fukuzawa