Title:
多軸干渉計ならびに多軸干渉計を用いる方法およびシステム
Document Type and Number:
Japanese Patent JP4790632
Kind Code:
B2
Abstract:
In general, in one aspect, the invention features an apparatus including a multi-axis interferometer configured to produce at least three output beams each including interferometric information about a distance between the interferometer and a measurement object along a corresponding measurement axis, wherein at least three of the measurement axes are in a common plane, wherein the output beams each include a component that makes a pass to the measurement object along a common beam path.
Inventors:
Hill, Henry A.
Application Number:
JP2006549361A
Publication Date:
October 12, 2011
Filing Date:
January 06, 2005
Export Citation:
Assignee:
ZYGO CORPORATION
International Classes:
G01B9/02; G01B11/00; G01B11/245; H01L21/027
Domestic Patent References:
| JP63196358A | ||||
| JP2005525539A | ||||
| JP11351836A | ||||
| JP2000286490A |
Foreign References:
| WO2003064977A1 | ||||
| US6757066 | ||||
| WO2003064962A1 |
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Makoto Onda