Title:
シミュレーション装置,シミュレーション方法,シミュレーション用プログラムおよび同プログラムを記録したコンピュータ読取可能な記録媒体
Document Type and Number:
Japanese Patent JP4792460
Kind Code:
B2
Abstract:
The simulation apparatus includes mesh dividing section (11), process condition setting section (12), boundary surface simulating section (13) for simulating a change in a shape of a boundary surface of the structure which change is caused from the process using the calculation condition set by the process condition setting section (12), level value determining section (14) for determining level values each of which concerns a distance between one of the nodes and the boundary surface, and level value data retaining section (20) for retaining, for each of the nodes, the level value in association with the boundary surface. The simulation apparatus makes it possible to express a number of materials being smaller in size than the mesh element. Consequently, the mesh element size can be set larger to improve the memory consumption amount and the calculation speed.
More Like This:
Inventors:
Atsushi Furuya
Shimizu Kaichi
Shimizu Kaichi
Application Number:
JP2007508004A
Publication Date:
October 12, 2011
Filing Date:
March 17, 2005
Export Citation:
Assignee:
富士通株式会社
International Classes:
H01L21/00
Domestic Patent References:
| JP2000340476A | 2000-12-08 |
Attorney, Agent or Firm:
Yu Sanada