Title:
薄膜の形成方法およびそれに用いるマスク
Document Type and Number:
Japanese Patent JP4793261
Kind Code:
B2
Inventors:
Kazuo Kobayashi
Application Number:
JP2006351817A
Publication Date:
October 12, 2011
Filing Date:
December 27, 2006
Export Citation:
Assignee:
Brother Industries, Ltd.
International Classes:
C23C24/04; B05D1/32
Domestic Patent References:
| JP9087828A | ||||
| JP2004091854A | ||||
| JP2004095793A | ||||
| JP2004149887A | ||||
| JP2005349568A | ||||
| JP2006307282A | ||||
| JP2000094328A | ||||
| JP2004277851A | ||||
| JP2003119573A |
Attorney, Agent or Firm:
Minoru Torinosu
Shinichi Nakajima
Shinichi Nakajima