Title:
パターン形状評価方法
Document Type and Number:
Japanese Patent JP4801427
Kind Code:
B2
Abstract:
A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise.
Inventors:
Atsuko Yamaguchi
Hiroshi Fukuda
Omuro Osamu
Hiroki Kawada
Hiroshi Fukuda
Omuro Osamu
Hiroki Kawada
Application Number:
JP2005343047A
Publication Date:
October 26, 2011
Filing Date:
November 29, 2005
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G01B15/04; G01B15/08; H01L21/66
Domestic Patent References:
| JP2003037139A | ||||
| JP7035541A | ||||
| JP2000019094A | ||||
| JP7332920A | ||||
| JP11160053A | ||||
| JP11094847A | ||||
| JP59168305A | ||||
| JP3152409A |
Attorney, Agent or Firm:
Manabu Inoue