Title:
電子顕微鏡及び複合照射レンズ
Document Type and Number:
Japanese Patent JP4807592
Kind Code:
B2
Abstract:
An object of the present invention is to provide an electron microscope that employs a hologram of a diffraction pattern to reconstruct a microscopic image involving no imaging aberration due to image forming lenses, as well as a combined illumination lens used for such an electron microscope. The electron microscope according to the present invention has an electron source (11), a condenser lens (12), a biprism (13) to split an electron beam supplied from the condenser lens (12) into coherent first and second electron beams (L1, L2) that are parallel to each other, a combined illumination lens (15) to make the first electron beam (L1) into a parallel wave and the second electron beam (L2) into a converging wave that converges at a predetermined distance, a sample stage (16) to hold a sample illuminated with the first electron beam (L1), a detector (17) to detect a hologram of a diffraction pattern formed by interference of the first electron beam (L1) with the second electron beam (L2), a computing unit (18) to conduct a predetermined Fourier transform on the hologram supplied from the detector (17) and reconstruct a microscopic image of the sample, and a display (19) to display the reconstructed microscopic image.
Inventors:
Hisami Endo
Masato Achihara
Katsushige Tsuno
Tetsuo Oikawa
Masato Achihara
Katsushige Tsuno
Tetsuo Oikawa
Application Number:
JP2007503758A
Publication Date:
November 02, 2011
Filing Date:
February 17, 2006
Export Citation:
Assignee:
Kyoto University of Technology
International Classes:
H01J37/295; H01J37/153; H01J37/22
Domestic Patent References:
| JPS6465762A | 1989-03-13 | |||
| JP2004296908A | 2004-10-21 | |||
| JPS54122970A | 1979-09-22 | |||
| JP2004171922A | 2004-06-17 | |||
| JP2002117800A | 2002-04-19 | |||
| JP2966474B2 | 1999-10-25 | |||
| JPS5894254U | 1983-06-25 |
Attorney, Agent or Firm:
Hidekazu Miyoshi