Title:
熱処理装置
Document Type and Number:
Japanese Patent JP4808425
Kind Code:
B2
Inventors:
Shohei Tsuji
Application Number:
JP2005080913A
Publication Date:
November 02, 2011
Filing Date:
March 22, 2005
Export Citation:
Assignee:
Koyo Thermo System Co., Ltd.
International Classes:
F27D17/00; F27B17/00; F27D15/02; H01L21/22
Domestic Patent References:
| JP2002171776A | ||||
| JP2002256440A | ||||
| JP2005101237A | ||||
| JP2004350479A | ||||
| JP2000068183A | ||||
| JP2002235985A | ||||
| JP2001068425A | ||||
| JP4215423A | ||||
| JP10242155A | ||||
| JP2000274955A |
Foreign References:
| WO2006090430A1 |
Attorney, Agent or Firm:
Kaede International Patent Office
Hisao Komori
Toshio Ozawa
Hisao Komori
Toshio Ozawa