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Patent Searching and Data


Title:
熱処理装置
Document Type and Number:
Japanese Patent JP4808425
Kind Code:
B2
Inventors:
辻 荘平
Application Number:
JP2005080913A
Publication Date:
November 02, 2011
Filing Date:
March 22, 2005
Export Citation:
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Assignee:
光洋サーモシステム株式会社
International Classes:
F27D17/00; F27B17/00; F27D15/02; H01L21/22
Domestic Patent References:
JP2002171776A
JP2002256440A
JP2005101237A
JP2004350479A
JP2000068183A
JP2002235985A
JP2001068425A
JP4215423A
JP10242155A
JP2000274955A
Foreign References:
WO2006090430A1
Attorney, Agent or Firm:
特許業務法人 楓国際特許事務所
小森 久夫
小澤 壯夫