Title:
位置測定装置
Document Type and Number:
Japanese Patent JP4809578
Kind Code:
B2
Abstract:
Position measurement instrument, for determining the relative positions of two objects, comprises a light source and signal generator for producing displacement dependent output signals. The light source is a single mode laser that interacts with feedback means that cause the excitation of multiple modes and result in mulitmode operation of a single mode laser light source.
Inventors:
Wolffgang Holzapfer
Udo Linneman
Udo Linneman
Application Number:
JP2003185349A
Publication Date:
November 09, 2011
Filing Date:
June 27, 2003
Export Citation:
Assignee:
DR. JOHANNES HEIDENHAIN GESELLSCHAFT MIT BESCHRANKTER HAFTUNG
International Classes:
G01B11/00; G01D5/347; G01B9/02; G01D5/26; G01D5/36; G01D5/38; H01L31/12; H01S5/14
Domestic Patent References:
| JP2110319A | ||||
| JP61240691A | ||||
| JP95028A |
Attorney, Agent or Firm:
Mitsufumi Esaki
Tsuneo Mihara
Blacksmith
Tsuneo Mihara
Blacksmith