Title:
チップ剥離装置およびチップ剥離方法ならびにチップピックアップ装置
Document Type and Number:
Japanese Patent JP4816622
Kind Code:
B2
Inventors:
Teruaki Kasai
Makoto Okazaki
Makoto Okazaki
Application Number:
JP2007293924A
Publication Date:
November 16, 2011
Filing Date:
November 13, 2007
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
H01L21/67; H01L21/52
Domestic Patent References:
| JP7335720A | ||||
| JP2000195877A | ||||
| JP2003179126A | ||||
| JP2006191144A |
Attorney, Agent or Firm:
Hiroki Naito
Daisuke Nagano
Kentaro Fujii
Daisuke Nagano
Kentaro Fujii