Title:
半導体装置の製造方法
Document Type and Number:
Japanese Patent JP4819188
Kind Code:
B2
Inventors:
Masazumi Matsuura
Application Number:
JP2011020583A
Publication Date:
November 24, 2011
Filing Date:
February 02, 2011
Export Citation:
Assignee:
Renesas Electronics Corporation
International Classes:
H01L21/768; H01L21/3065; H01L21/312; H01L21/316; H01L23/522
Domestic Patent References:
| JP2000195864A | ||||
| JP11017008A | ||||
| JP10092924A | ||||
| JP10284602A | ||||
| JP4023465A | ||||
| JP10125782A | ||||
| JP10256372A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita