Title:
三次元計測装置及び基板検査装置
Document Type and Number:
Japanese Patent JP4827431
Kind Code:
B2
Inventors:
Takahiro Mamiya
Nobuyuki Umemura
Kohei Yamazaki
Ikuo Nimura
Hiroyuki Ishigaki
Nobuyuki Umemura
Kohei Yamazaki
Ikuo Nimura
Hiroyuki Ishigaki
Application Number:
JP2005118249A
Publication Date:
November 30, 2011
Filing Date:
April 15, 2005
Export Citation:
Assignee:
CKD Corporation
International Classes:
G01B11/25; G01N21/956
Domestic Patent References:
| JP5340727A | ||||
| JP8159719A | ||||
| JP10293014A | ||||
| JP63106501A | ||||
| JP6421581A |
Attorney, Agent or Firm:
Mitsuo Kawaguchi