Title:
半導体装置の作製方法
Document Type and Number:
Japanese Patent JP4836446
Kind Code:
B2
Abstract:
To provide a method of manufacturing a low-cost organic TFT which does not depend on a high-price exclusive apparatus and does not expose an organic semiconductor to the air, and a method of manufacturing an organic TFT at a low temperature enough to avoid causing thermal decomposition of the materials.
A filmy protector functioning as a protective film is provided on an organic semiconductor film. This protector may be formed by fixing a filmy support with adhesives, etc.
COPYRIGHT: (C)2005,JPO&NCIPI
Inventors:
Yoshiharu Hiragata
Tetsuji Ishitani
Shuji Fukai
Ryota Imabashi
Tetsuji Ishitani
Shuji Fukai
Ryota Imabashi
Application Number:
JP2004359559A
Publication Date:
December 14, 2011
Filing Date:
December 13, 2004
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
H01L29/786; H01L51/05; H01L51/00
Domestic Patent References:
| JP2003318195A | ||||
| JP2002108250A | ||||
| JP2002314093A |