Title:
基板検査用治具及び基板検査用治具の電極部構造
Document Type and Number:
Japanese Patent JP4838658
Kind Code:
B2
Inventors:
Minoru Kato
Application Number:
JP2006209473A
Publication Date:
December 14, 2011
Filing Date:
August 01, 2006
Export Citation:
Assignee:
Nidec Read Corporation
International Classes:
G01R1/06; G01R1/067; H05K3/00
Domestic Patent References:
| JP3036558Y2 | ||||
| JP2003506833A |
Attorney, Agent or Firm:
Itasaka Kiyoshi
Hideaki Kitamura
Hideaki Kitamura