Title:
超電導回路装置の製造方法
Document Type and Number:
Japanese Patent JP4843772
Kind Code:
B2
Abstract:
To reduce average surface roughness so as to enable stable circuit operation and to enable rapid operation by improving a process.
A Josephson element 4 composed of a high temperature superconductor is provided on a ground plane 2 formed of a high temperature superconductor via a first insulating layer 3, and the side edge face of the ground plane 2 is brought into direct contact with a second insulating layer 10 covering a counter electrode 7 of the Josephson element 4.
COPYRIGHT: (C)2006,JPO&NCIPI
Inventors:
Namito Keihiro
Seiji Adachi
Maruyama Michitaka
Yuki Wakana
Kohei Nakayama
Hideo Suzuki
Yoshiyasu Ishimaru
Yoshinobu Tarutani
Keiichi Tanabe
Seiji Adachi
Maruyama Michitaka
Yuki Wakana
Kohei Nakayama
Hideo Suzuki
Yoshiyasu Ishimaru
Yoshinobu Tarutani
Keiichi Tanabe
Application Number:
JP2004250013A
Publication Date:
December 21, 2011
Filing Date:
August 30, 2004
Export Citation:
Assignee:
富士通株式会社
財団法人国際超電導産業技術研究センター
財団法人国際超電導産業技術研究センター
International Classes:
H01L39/22; H01L39/24
Domestic Patent References:
| JP1086576A | ||||
| JP2001345489A | ||||
| JP2004079723A | ||||
| JP2004128437A |
Attorney, Agent or Firm:
Kenji Doi
Hayashi Tsunetoku
Shoji Kashiwaya
Koichi Watanabe
Manabe Kiyoshi
Toshiro Ito
Hayashi Tsunetoku
Shoji Kashiwaya
Koichi Watanabe
Manabe Kiyoshi
Toshiro Ito