Title:
固体撮像装置の製造方法、固体撮像装置およびカメラ
Document Type and Number:
Japanese Patent JP4843951
Kind Code:
B2
Abstract:
To provide a method for producing a solid-state imaging device enabling an improvement of a light sensitivity characteristic in a light receiving unit, a solid-state imaging device in which the light sensitivity characteristic is improved, and a camera provided with the solid-state imaging device. A shield film projected around the light receiving unit is formed on a substrate in which the light receiving unit is formed; an transparent insulation film is formed on the shield film; a sidewall insulation film is formed by etch-back of the insulation film, in a side wall of the shield film; a mask layer having an aperture at a position corresponding to the light receiving unit is formed on the shield film; and the shield film is etched by using the sidewall insulation film and the mask layer as a mask to form an aperture portion exposing the light receiving unit.
Inventors:
Hiroyuki Miyamoto
Dofuku Tadayuki
Dofuku Tadayuki
Application Number:
JP2005019796A
Publication Date:
December 21, 2011
Filing Date:
January 27, 2005
Export Citation:
Assignee:
ソニー株式会社
International Classes:
H01L27/14; H04N5/335; H04N5/369; H04N5/372
Domestic Patent References:
| JP5183136A | ||||
| JP5167052A | ||||
| JP5218371A | ||||
| JP63177551A |
Attorney, Agent or Firm:
Takahisa Sato