Title:
照明装置、露光装置及びマイクロデバイスの製造方法
Document Type and Number:
Japanese Patent JP4844398
Kind Code:
B2
Abstract:
An illumination apparatus is arranged to illuminate a surface to be illuminated M with illumination light emitted from a light source 5. The illumination apparatus includes an incidence-side reflection-type fly-eye optical system 12 having multiple reflection-type partial optical systems arranged in rows, an emission-side reflection-type fly-eye optical system 14 having multiple reflection-type partial optical systems arranged in rows such that the multiple reflection-type partial optical systems in the emission-side reflection-type fly-eye optical system respectively correspond to the multiple reflection-type partial optical systems in the incidence-side reflection-type fly-eye optical system 12, and a condensing optical system including two reflecting mirrors 18, 20 that guide illumination light, reflected by the emission-side reflection-type fly-eye optical system 14, to the surface to be illuminated M. At least one of the two reflecting mirrors has a center of curvature that is optically eccentric with respect to a normal to the surface to be illuminated M at the center of the illuminated region.
Inventors:
Hideki Komatsuda
Application Number:
JP2006545056A
Publication Date:
December 28, 2011
Filing Date:
November 15, 2005
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B19/00; H01L21/027; G03F7/20
Domestic Patent References:
| JP2003045784A | 2003-02-14 | |||
| JP2003045774A | 2003-02-14 |
Foreign References:
| WO2004021086A1 | 2004-03-11 | |||
| WO2004038773A1 | 2004-05-06 |
Attorney, Agent or Firm:
Yoshihiro Fujimoto