Title:
ドライエッチング方法
Document Type and Number:
Japanese Patent JP4854874
Kind Code:
B2
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Inventors:
Etsuo Iijima
Application Number:
JP2001189579A
Publication Date:
January 18, 2012
Filing Date:
June 22, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/302; H01L21/3065; H01L21/76
Domestic Patent References:
| JP2014548A | ||||
| JP11145113A | ||||
| JP2000294626A | ||||
| JP9205183A | ||||
| JP2001118829A | ||||
| JP2001035808A | ||||
| JP11297668A | ||||
| JP11288923A | ||||
| JP11243080A | ||||
| JP11111677A | ||||
| JP7106583A | ||||
| JP3141640A | ||||
| JP2260424A | ||||
| JP57131374A |
Attorney, Agent or Firm:
Saichi Suyama