Title:
外観検査装置及び方法
Document Type and Number:
Japanese Patent JP4874103
Kind Code:
B2
Abstract:
A rotary polygon mirror (11) is constituted such that the condensing point of a scanning light flux is deviated in a sub-scanning direction (Y) as it rotates at an isogonal speed and an angle (?) formed between the rotation axis (11b) and a mirror plane differs from one mirror plane to another, a condensing point position forming optical system (2, 17) is constituted such that the condensing point moves within an inspection range Zr in a height direction Z, and an object of inspection (3) is moved in a sub-scanning direction so that the condensing point deviated in the sub-scanning direction and the height direction in synchronization with the isogonal-speed rotation of the rotary polygon mirror is scanned linearly in the height direction of the object of inspection to complete XYZ scanning, whereby the positional coordinates of the appearance of the object of inspection are obtained by a confocal method to perform visual inspection.
Inventors:
Yuji Ono
Application Number:
JP2006528335A
Publication Date:
February 15, 2012
Filing Date:
April 12, 2006
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
G01B11/24
Domestic Patent References:
| JPH1137723A | 1999-02-12 | |||
| JP2000009422A | 2000-01-14 | |||
| JPS5662219A | 1981-05-28 | |||
| JPS51122462A | 1976-10-26 |
Attorney, Agent or Firm:
Mitsuo Tanaka
Mitsuo Wada
Mitsuo Wada