Title:
流量制御システム
Document Type and Number:
Japanese Patent JP4874576
Kind Code:
B2
Inventors:
Yoshisuke Ushikusa
Hironori Igarashi
Masahiro Hasunuma
Hironori Igarashi
Masahiro Hasunuma
Application Number:
JP2005167073A
Publication Date:
February 15, 2012
Filing Date:
June 07, 2005
Export Citation:
Assignee:
Surpass Industry Co., Ltd.
International Classes:
G01F1/34; G01F1/48; G05D7/06
Domestic Patent References:
| JP11153462A | ||||
| JP2001147722A | ||||
| JP11118054A | ||||
| JP58060060U | ||||
| JP53095316A | ||||
| JP62209279A | ||||
| JP11125355A |
Foreign References:
| WO2003032101A1 | ||||
| US6321776 |
Other References:
E W Randall, M Kojima, C T O'Connor, K Herzog,A capillary gas flow control system,Journal of Physics E: Scientific Instruments,英国,IOP Publishing Ltd,1988年 5月,Vol.21 No.5,p.505-507
Attorney, Agent or Firm:
Noriharu Fujita
Kunio Ueda
Kunio Ueda