石英ガラスの光学部材、この光学部材の製造方法そしてそれの利用 - Heraeus Quartz Glass Game Behr und Companion Car Game

Title:

石英ガラスの光学部材、この光学部材の製造方法そしてそれの利用

Document Type and Number:

Japanese Patent JP4874700

Kind Code:

B2

Abstract:

Quartz glass optical component for use as projection/objective for immersion lithography at a working wavelength of 250 nm. The quartz glass has properties: glass structure devoid of oxygen defect sites; mean hydrogen content 1X10 16>-1X10 17>molecules/sq.cm; mean SiH group content less than 5X10 17>molecules/sq.cm; mean OH group content less than 60 wt.ppm; mean F content less than 10 wt.ppm; mean Cl content less than 1 wt.ppm; and imaginary (fiktiv, sic) temperature above 1040[deg]C. An independent claim is included for a method of producing the component from an SiO 2soot body.

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Inventors:

Coon bud
Ox Stefan
Kaiser Stefen
Dennis Casbet

Application Number:

JP2006112974A

Publication Date:

February 15, 2012

Filing Date:

April 17, 2006

Export Citation:

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Assignee:

Heraeus Quartz Glass Game Behr und Companion Car Game
Shin-Etsu Quartz Products Co., Ltd.

International Classes:

C03C3/06; C03B8/04; C03B20/00; G02B1/02; G03F7/20; H01L21/027

Domestic Patent References:

JP558668A
JP2003286040A
JP2005289801A

Attorney, Agent or Firm:

Koichi Nakazato
Hitoshi Kawasaki

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