Title:
電子ビーム物理蒸着被覆装置と該装置用のインゴット・マガジン
Document Type and Number:
Japanese Patent JP4875817
Kind Code:
B2
Inventors:
Bruce, Robert William
Evans, John Douglas, Senior
Maricocchi, Antonio Frank
Vigui, Rudolph
David John Waltman
David Vincent, Rigny
Willen, William Seth
Evans, John Douglas, Senior
Maricocchi, Antonio Frank
Vigui, Rudolph
David John Waltman
David Vincent, Rigny
Willen, William Seth
Application Number:
JP2001515349A
Publication Date:
February 15, 2012
Filing Date:
August 03, 2000
Export Citation:
Assignee:
GENERAL ELECTRIC COMPANY
International Classes:
C23C14/30; C23C14/56
Domestic Patent References:
| JP2003522294A | 2003-07-22 | |||
| JPH1068067A | 1998-03-10 | |||
| JP2000096216A | 2000-04-04 | |||
| JPH03104860A | 1991-05-01 | |||
| JPS62247067A | 1987-10-28 | |||
| JPH06272028A | 1994-09-27 |
Attorney, Agent or Firm:
Arakawa Satoshi