Title:
マルチメタルレイヤMEMS構造及びこれを作製するプロセス
Document Type and Number:
Japanese Patent JP4880878
Kind Code:
B2
Abstract:
The present invention is directed to a structure comprised of alternating layers of metal and sacrificial material built up using standard CMOS processing techniques, a process for building such a structure, a process for fabricating devices from such a structure, and the devices fabricated from such a structure. In one embodiment, a first metal layer is carried by a substrate. A first sacrificial layer is carried by the first metal layer. A second metal layer is carried by the sacrificial layer. The second metal layer has a portion forming a micro-machined metal mesh. When the portion of the first sacrificial layer in the area of the micro-machined metal mesh is removed, the micro-machined metal mesh is released and suspended above the first metal layer a height determined by the thickness of the first sacrificial layer. The structure may be varied by providing a base layer of sacrificial material between the surface of the substrate and the first metal layer. In that manner, a portion of the first metal layer may form a micro-machined mesh which is released when a portion of the base sacrificial layer in the area of the micro-machined mesh is removed. Additionally, a second layer of sacrificial material and a third metal layer may be provided. A micro-machined mesh may be formed in a portion of the third metal layer. The structure of the present invention may be used to construct variable capacitors, switches and, when certain of the meshes are sealed, microspeakers and microphones.
Inventors:
Kai Gum Jay Gabriel
Shu Chu
Shu Chu
Application Number:
JP2004011617A
Publication Date:
February 22, 2012
Filing Date:
January 20, 2004
Export Citation:
Assignee:
Akustica,Inc.
International Classes:
B81B3/00; B81C1/00; C23F1/00; H01G4/00; H01G5/00; H01G7/00; H01G9/00; H01G13/00; H01H59/00; H01L23/48; H01L23/52; H04R19/00; H04R19/02; H04R19/04; H04R31/00
Domestic Patent References:
| JP8213803A | ||||
| JP2001514434A | ||||
| JP6112509A | ||||
| JP2001508940A |
Attorney, Agent or Firm:
Shinjiro Ono
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Takuto Tanaka
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Takuto Tanaka