Title:
点火補助具およびこれを備えた冷陰極電離真空計
Document Type and Number:
Japanese Patent JP4905704
Kind Code:
B2
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Inventors:
Tsuyoshi Miyashita
Ryota Tanaka
Ryota Tanaka
Application Number:
JP2007152665A
Publication Date:
March 28, 2012
Filing Date:
June 08, 2007
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G01L21/34
Domestic Patent References:
| JP200225398A | ||||
| JP5047483U | ||||
| JP95198A | ||||
| JP10510921A | ||||
| JP347085Y1 | ||||
| JP10267780A | ||||
| JP3293533A | ||||
| JP60534U | ||||
| JP4528463B1 |
Attorney, Agent or Firm:
Junichi Omori
Ori Akira
Yasuo Iisaka
Ori Akira
Yasuo Iisaka