Title:
プラズマエッチング用フォーカスリングおよびシールドリング
Document Type and Number:
Japanese Patent JP4905855
Kind Code:
B2
Inventors:
Li Xian
Takashi Yonehisa
Satoshi Fujita
Takashi Yonehisa
Satoshi Fujita
Application Number:
JP2007088137A
Publication Date:
March 28, 2012
Filing Date:
March 29, 2007
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
H01L21/3065; C30B29/06
Domestic Patent References:
| JP2005303045A | ||||
| JP2005243758A | ||||
| JP2006128372A | ||||
| JP2007081382A | ||||
| JP2007081381A | ||||
| JP2008159773A | ||||
| JP2007273707A |
Attorney, Agent or Firm:
Kazuo Tomita
Kageyama Shuichi
Kageyama Shuichi