Title:
切削ブレードの振幅計測装置
Document Type and Number:
Japanese Patent JP4908143
Kind Code:
B2
Inventors:
Sosuke Kumagai
Application Number:
JP2006278431A
Publication Date:
April 04, 2012
Filing Date:
October 12, 2006
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B23Q17/12; B24B1/04; B24B27/06; B24B49/12; G01B17/00; H01L21/301
Domestic Patent References:
| JP2006140210A | ||||
| JP6008139A | ||||
| JP2001259972A | ||||
| JP5063487A | ||||
| JP61210948A |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Sachiko Okunuki