Title:
干渉測定装置
Document Type and Number:
Japanese Patent JP4909244
Kind Code:
B2
Abstract:
An interference measuring device comprises light sources lenses, an aperture, an optical multiplexer, an optical branching filter, a half mirror, an imaging unit, an analyzing unit, a light receiving unit, a displacement detecting unit, a piezoelectric actuator, a drive unit, a mirror, a stage, a drive unit, and a control unit. According to a result of optical path length difference detection by the displacement detecting unit, the control unit controls optical path length difference adjusting operations by the piezoelectric actuator and stage through the drive units such that the optical path length difference becomes a plurality of target values in sequence. The control unit subjects the moving operation by the piezoelectric actuator to a feedback control such that the optical path length difference becomes each of the target values upon the moving operation by the stage as well.
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Inventors:
Toyohiko Yamauchi
Hidei Iwai
Hidei Iwai
Application Number:
JP2007298019A
Publication Date:
April 04, 2012
Filing Date:
November 16, 2007
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
G01B9/02; G01B11/24
Domestic Patent References:
| JP6508205A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki
Satoru Ishida
Masatoshi Shibata
Shiro Terasaki
Satoru Ishida
Masatoshi Shibata