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Title:
定量送液ポンプおよびそれを用いた薬液塗布装置
Document Type and Number:
Japanese Patent JP4916793
Kind Code:
B2
Inventors:
櫻井 明
Application Number:
JP2006180806A
Publication Date:
April 18, 2012
Filing Date:
June 30, 2006
Export Citation:
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Assignee:
株式会社鷺宮製作所
International Classes:
F04B13/00; B05C5/00; B05C11/10; F04B43/10
Domestic Patent References:
JP11107924A
JP54051004A
JP48020807B1
JP9014451A
JP10047234A
JP2002257033A
JP9310681A
JP9170559A
Attorney, Agent or Firm:
牧村 浩次
高畑 ちより
鈴木 亨



 
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