Title:
応力成分測定方法
Document Type and Number:
Japanese Patent JP4917485
Kind Code:
B2
Abstract:
A method of measuring a stress component in a short period of time in a nondestructive manner and a stress component measurement device that includes a stress component comparison section that compares a Raman spectrum L obtained in a predetermined area W1 of a reference specimen W to which a given stress component is applied with the stress component, a correlation data production section that produces correlation data indicating a correlation between the Raman spectrum L and the stress component by the use of a multivariate analysis method based on the comparison results conducted by the stress component comparison section. The comparison is conducted multiple times on different predetermined areas W1. A correlation data storage section stores the correlation data, and a stress component calculation section calculates a stress component applied to a measurement area W1′ of a measurement specimen W′ whose composition is the same as that of the reference specimen W based on the Raman spectrum L obtained from the measurement area W1′ and the correlation data.
Inventors:
Middle class
Shinsuke Kashiwagi
Shinsuke Kashiwagi
Application Number:
JP2007171149A
Publication Date:
April 18, 2012
Filing Date:
June 28, 2007
Export Citation:
Assignee:
HORIBA, Ltd.
International Classes:
G01L1/00
Domestic Patent References:
| JP2006105599A | ||||
| JP2005331386A | ||||
| JP4047254A | ||||
| JP6026945A | ||||
| JP2005233928A |
Attorney, Agent or Firm:
Ryuhei Nishimura
Akiko Sato
Akiko Sato