Title:
透過型電子顕微鏡の情報伝達限界測定法およびこの測定法が適用された透過型電子顕微鏡
Document Type and Number:
Japanese Patent JP4920370
Kind Code:
B2
Abstract:
A crystal thin film is adopted as a specimen for measurement. A change in the contrast of crystal lattice fringes is measured under a condition that a diffracted wave and other wave are caused to'interfere with each other. Thus, an information transfer limit of a transmission electron microscope can be measured quantitatively. Since the measurement is performed with a condition for interference restricted, the information transfer limit of the transmission electron microscope can be quantitatively assessed.
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Inventors:
Takaho Yoshida
Application Number:
JP2006294907A
Publication Date:
April 18, 2012
Filing Date:
October 30, 2006
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01J37/26
Domestic Patent References:
| JP2006107923A | ||||
| JP5217537A |
Attorney, Agent or Firm:
Polaire Patent Business Corporation