Title:
イオンビームを用いる断面試料作製方法
Document Type and Number:
Japanese Patent JP4922632
Kind Code:
B2
Inventors:
Asahina Shunsuke
Application Number:
JP2006074740A
Publication Date:
April 25, 2012
Filing Date:
March 17, 2006
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
G01N1/28; G01N1/32
Domestic Patent References:
JP3263920B2 | ||||
JP2005308400A | ||||
JP2004501370A | ||||
JP2002299546A | ||||
JP2005077359A | ||||
JP2005351657A | ||||
JP2001121273A |