Title:
ビーム照射方法、及び、ビーム照射装置
Document Type and Number:
Japanese Patent JP4925101
Kind Code:
B2
Inventors:
Kimura Sadahiko
Application Number:
JP2006289470A
Publication Date:
April 25, 2012
Filing Date:
October 25, 2006
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
B23K26/073; B23K26/08; H01L21/268; B23K101/40
Domestic Patent References:
| JP2004188483A | ||||
| JP11104876A | ||||
| JP2002283084A | ||||
| JP2001150158A |
Attorney, Agent or Firm:
Mikio Kuruyama
Keishiro Takahashi
Ukai Shinichi
Keishiro Takahashi
Ukai Shinichi