Title:
半導体装置
Document Type and Number:
Japanese Patent JP4929882
Kind Code:
B2
Inventors:
Katsunori Ueno
Masato Otsuki
Masato Otsuki
Application Number:
JP2006189917A
Publication Date:
May 09, 2012
Filing Date:
July 11, 2006
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
H01L29/47; H01L29/872
Domestic Patent References:
| JP2006147951A | ||||
| JP7211924A |
Attorney, Agent or Firm:
Yoichi Matsumoto