Title:
塩基性化合物、感放射線性酸拡散制御剤及びポジ型感放射線性樹脂組成物
Document Type and Number:
Japanese Patent JP4940621
Kind Code:
B2
Inventors:
Eiji Yoneda
Tsutomu Shimokawa
Tsutomu Shimokawa
Application Number:
JP2005300865A
Publication Date:
May 30, 2012
Filing Date:
October 14, 2005
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
C07C309/14; C07C381/12; G03F7/004; G03F7/039; H01L21/027
Domestic Patent References:
| JP2002214774A | ||||
| JP2005266766A | ||||
| JP11072920A | ||||
| JP8268998A | ||||
| JP2001109157A | ||||
| JP2006208781A |
Foreign References:
| WO2004078703A1 |
Attorney, Agent or Firm:
Kiyoshi Kojima
Hayakawa Daitou
Yoshinobu Hagino
Hayakawa Daitou
Yoshinobu Hagino