照明光学系、露光装置および露光方法

Title:

照明光学系、露光装置および露光方法

Document Type and Number:

Japanese Patent JP4952800

Kind Code:

B2

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Inventors:

Osamu Yatsu
Toshi Nishinaga
Kudo Taketo

Application Number:

JP2010003938A

Publication Date:

June 13, 2012

Filing Date:

January 12, 2010

Export Citation:

Assignee:

NIKON CORPORATION

International Classes:

H01L21/027; G02B5/04; G02B19/00

Domestic Patent References:

Attorney, Agent or Firm:

Yoshiki Hasegawa
Shiro Terasaki

Previous Patent: JPS4952799

Next Patent: 照明光学系、露光装置および露光方法