Title:
X線回折方法及びX線回折装置
Document Type and Number:
Japanese Patent JP4971383
Kind Code:
B2
Abstract:
In an X-ray diffraction method using the parallel beam method, an X-ray parallel beam (24) is incident on a sample (26), and diffracted X-rays (28) from the sample (26) are reflected at a mirror (18) and thereafter detected by an X-ray detector (20). The reflective surface (19) of the mirror (18) consists of a combination of plural flat reflective surfaces (46, 48). The respective centers of the flat reflective surfaces (46, 48) are located on an equiangular spiral having a center that is located on a surface of the sample (26). The X-ray detector (20) is one-dimensional position-sensitive in a plane parallel to the diffraction plane. X-rays that have been reflected at different flat reflective surfaces (46, 48) reach different points on the X-ray detector (20) respectively. A corrective operation is performed for separately recognizing the different reflected X-rays on the assumption that the different reflected X-rays that have been reflected at the different flat reflective surfaces (46, 48) might be unfortunately mixed each other on the same detecting region of the X-ray detector (20). This X-ray diffraction method is superior in angular resolution, and is small in X-ray intensity reduction, and is simple in structure.
Inventors:
Hideya Toraya
Konaka
Konaka
Application Number:
JP2009073254A
Publication Date:
July 11, 2012
Filing Date:
March 25, 2009
Export Citation:
Assignee:
Rigaku Corporation
International Classes:
G01N23/207
Domestic Patent References:
| JP3210462A | ||||
| JP5107203A | ||||
| JP2000146872A | ||||
| JP2002131251A | ||||
| JP2002333409A | ||||
| JP2007240192A | ||||
| JP7063897A | ||||
| JP7072298A | ||||
| JP2009085668A | ||||
| JP2009085669A |
Attorney, Agent or Firm:
Toshiyuki Suzuki