Title:
フォトマスクブランクの製造方法
Document Type and Number:
Japanese Patent JP4974194
Kind Code:
B2
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Inventors:
Mitsui Masaru
Suzuki Toshiyuki
Shigenori Ishihara
Suzuki Toshiyuki
Shigenori Ishihara
Application Number:
JP2010140450A
Publication Date:
July 11, 2012
Filing Date:
June 21, 2010
Export Citation:
Assignee:
HOYA CORPORATION
International Classes:
G03F1/54; C23C14/06; C23C14/34; C23C14/58; G03F1/32
Domestic Patent References:
| JP2001056545A | ||||
| JP2000003029A | ||||
| JP6151421A | ||||
| JP2001152323A | ||||
| JP2002114527A |
Attorney, Agent or Firm:
Yasuo Fujimura