Title:
光束変換素子、照明光学装置、露光装置、および露光方法
Document Type and Number:
Japanese Patent JP4976015
Kind Code:
B2
Abstract:
A light optical device capable of forming a bracelet-form lighting pupil distribution in a peripherally-polarized state with a light quantity loss satisfactorily controlled, the device comprising a light flux conversion element (50) for forming a bracelet-form light intensity distribution on a specified surface based on an incident light flux. The light flux conversion element comprises a first basic element (50A) formed of an optically-rotating material, for forming a first arcuate area distribution based on an incident light flux out of bracelet-form light intensity distribution, a second basic element (50B) for forming a second arcuate area distribution, a third basic element (50C) for forming a third arcuate area distribution, and fourth basic element (50D) for forming a fourth arcuate area distribution. Responsive basic elements have mutually different thickness along the light transmitting direction.
Inventors:
Mitsunori Toyota
Application Number:
JP2005515570A
Publication Date:
July 18, 2012
Filing Date:
November 02, 2004
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G02B19/00; G02B27/00; G02B27/28; G02B27/44; G03F7/20
Domestic Patent References:
| JPH07263315A | 1995-10-13 | |||
| JPH09184918A | 1997-07-15 | |||
| JP2003035822A | 2003-02-07 | |||
| JP2001272764A | 2001-10-05 | |||
| JPH07283119A | 1995-10-27 | |||
| JPH09160219A | 1997-06-20 | |||
| JPH06188169A | 1994-07-08 | |||
| JPH06124872A | 1994-05-06 | |||
| JPH0653120A | 1994-02-25 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Hiroto Kido
Masato Ikeda
Yoshiki Kuroki
Hiroto Kido
Masato Ikeda