Title:
加圧方法及び加圧装置
Document Type and Number:
Japanese Patent JP4979918
Kind Code:
B2
Inventors:
Yoshiaki Okada
Application Number:
JP2005275568A
Publication Date:
July 18, 2012
Filing Date:
September 22, 2005
Export Citation:
Assignee:
Bond Tech Co., Ltd.
International Classes:
H01L21/02; H01L21/60
Domestic Patent References:
| JP1316231A | ||||
| JP2003517727A | ||||
| JP2001266417A | ||||
| JP2001223244A | ||||
| JP2003203953A |
Attorney, Agent or Firm:
Ryose Uji